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Easy metal etching using electricity and rust removal

In this video, two simple methods for metal etching using electricity are demonstrated, serving as effective substitutes for ...
EDN

Lam says metal etcher for sub-150-nm processes eliminates consumable costs

FREMONT, Calif.–Lam Research Corp. today announces availability of a new high-density metal etch system for process applications in technology nodes below 0.15 micron (150 nanometers). The system ...
EDN

Applied launches etch tool for next-generation 300-mm fabs

SANTA CLARA, Calif.– Applied Materials Inc. today (March 29) rolled out a new etch platform, which the company says is the first etcher designed specifically to address next-generation process ...
Semiconductor Engineering

A Deposition And Etch Technique To Lower Resistance Of Semiconductor Metal Lines

Copper’s resistivity depends on its crystal structure, void volume, grain boundaries and material interface mismatch, which becomes more significant at smaller scales. The formation of copper (Cu) ...