Optical scatterometry is a non-destructive metrology technique used to characterize periodic nanostructures, such as gratings, arrays, and patterned surfaces. It involves measuring the intensity and ...

Ellipsometry is a total optical measurement technique. This method is employed to measure how the polarization of light changes when passing through a medium. The polarized light shows distortion ...

The Ellipsometry is a total optical measurement method. This technique is used to measure the change of polarization of light when passing through a medium. Due to the layer structure during ...