A phase-shift mask relies on the fact that light passing through a transparent media will undergo a phase change as a function of its optical thickness.

A phase-shift mask relies on the fact that light passing through a transparent media will undergo a phase change as a function of its optical thickness, the refractive index times the physical …

Figure 2.6: The most relevant types of phase-shifting masks (PSMs) and their operation principle in comparison to a conventional binary mask. The alternate or Levinson PSM offers …

Jun 16, 2025 · Phase Shift Masks (PSMs) are a crucial technology in the field of photolithography, used to enhance the resolution and accuracy of the pattern transfer process during the …

Jul 28, 2025 · Phase-shift masks (PSMs) have emerged as a powerful solution to these challenges, enhancing the resolution and image quality in photolithography. This blog will …

Phase-Shift Masks: Adding a phase-shifting function to the on-off property of binary masks yields a higher resolution at the same or even larger amount of depth of focus. The enhancement …

In alternating phase-shift masks, certain transmitting regions are made thinner or thicker. That induces a phase-shift in the light traveling through those regions of the mask (see the illustration).

Phase-shifting masks (PSM) achieve improved wafer printability with higher resolution and increased DOF (Depth of Focus), by controlling the phase shift and the transmission rate of …

•What phase-shift do we want in a mask to produce destructive interference? •Which PSM approach is most common in manufacturing today?

Phase-shift masks are photomasks that take advantage of the interference generated by phase differences to improve image resolution in photolithography. There exist alternating [1] and …